Description
Conference Co-Chair with responsibility for Publications| Period | 24 Mar 2008 → 27 Mar 2008 |
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| Event type | Conference |
| Location | EdinburghShow on map |
Related content
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Research output
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On-mask mismatch resistor structures for the characterisation of maskmaking capability
Research output: Chapter in Book/Report/Conference proceeding › Conference contribution
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Comparison of measurement techniques for advanced photomask metrology
Research output: Chapter in Book/Report/Conference proceeding › Conference contribution
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An evaluation of test structures for measuring the contact resistance of 3-D bonded interconnects
Research output: Chapter in Book/Report/Conference proceeding › Conference contribution
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Measurement and optimisation of bond strength for anodic bonding of glass to dielectric thin films
Research output: Chapter in Book/Report/Conference proceeding › Conference contribution
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Investigation of electrical and optical CD measurement techniques for the characterisation of on-mask GHOST proximity corrected features
Research output: Chapter in Book/Report/Conference proceeding › Conference contribution