Scottish Microelectronics Centre (SMC)

The SMC provides extensive cleanroom facilities with a full semiconductor/MEMS fabrication toolset and the ability to host staff from external organisations. We are located in a purpose built facility at the University of Edinburgh's Science and Engineering campus (The King's Buildings) consisting of approximately 250m2 of class 10 cleanroom and 1000m2 of office and laboratory space. Both office and cleanroom space are available for rent to commercial organisations alongside university students and staff of the Institute for Integrated Micro and Nano Systems(IMNS).

The SMC holds a comprehensive toolset for processing up to 200mm silicon wafers, with all tools capable of being changed between 75mm, 100mm, 150mm and 200mm configurations. The associated process and metrology equipment is mostly located in the class 10 cleanroom controlled to 21±1°C with a relative humidity of 40±5% with a raised floor being used as the air return to the plenum. Each bay is serviced with DI, town and chilled water, nitrogen, compressed air, power, gases and vacuum.

The facilities available at the SMC are capable of post processing sub-micron CMOS devices as well as being used to fabricate a wide-range of silicon and non-silicon based microsystems. The SMC supports many collaborative research projects as well as providing fabrication/processing services to both academia and industry.