Stewart Smith

DR

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  • 2009

    Practical application of OPC in electrical circuits

    McCallum, M., Tsiamis, A., Smith, S., Stevenson, J. T. M., Walton, A. J. & Hourd, A. C., 1 Jan 2009, Proceedings of SPIE - The International Society for Optical Engineering. Vol. 7488.

    Research output: Chapter in Book/Report/Conference proceedingOther chapter contribution

  • The integration of EWOD and SAW technologies for improved droplet manipulation and mixing

    Li, Y., Flynn, B. W., Parkes, W., Liu, Y., Feng, Y., Ruthven, A. D., Terry, J. G., Haworth, L. I., Bunting, A., Stevenson, T., Smith, S., Bobbili, P., Fu, Y. Q. & Walton, A. J., 1 Jan 2009, ESSDERC 2009 - Proceedings of the 39th European Solid-State Device Research Conference. p. 371-374 4 p.

    Research output: Chapter in Book/Report/Conference proceedingOther chapter contribution

  • 2007

    Extraction of sheet resistance and linewidth from all-copper ECD test structures fabricated from silicon preforms

    Shulver, B. J. R., Bunting, A., Gundlach, A. M., Haworth, L. I., Ross, A. W. S., Smith, S., Snell, T., Stevenson, T., Walton, A. J., Allen, R. A. & Cresswell, M. W., Mar 2007, IEEE International Conference on Microelectronic Test Structures 2007 . p. 14-19 6 p.

    Research output: Chapter in Book/Report/Conference proceedingOther chapter contribution

  • 2006

    Test structures for the characterisation of MEMS and CMOS integration technology

    Lin, H., Walton, A. J., Dunare, C. C., Stevenson, T., Gundlach, A. M., Smith, S. & Bunting, A. S., Mar 2006, IEEE International Conference on Microelectronic Test Structures. Vol. 2006. p. 143-148 6 p.

    Research output: Chapter in Book/Report/Conference proceedingOther chapter contribution