Development of test structures for characterising IC technologies (GR/L81000/01)

Walton, Anthony (Principal Investigator)
Haworth, Leslie (Co-investigator)
Murray, Alan (Co-investigator)

1 Article

1 results

2012
Electrical Test Structures for the Characterization of Optical Proximity Correction
Tsiamis, A., Smith, S., McCallum, M., Hourd, A., Stevenson, T. & Walton, A. J., 1 May 2012, In: IEEE Transactions on Semiconductor Manufacturing. 25, 2, p. 162 -169
Research output: Contribution to journal › Article › peer-review