Physics
Silicon Carbide
100%
Resonator
72%
Electrodes
47%
Aluminium
26%
Resonant Frequencies
26%
Utilization
26%
Amplitudes
26%
Behavior
23%
Vibration
23%
Microelectromechanical System
20%
Microelectromechanical System
20%
Vapor
20%
Single Crystals
20%
Dimensions
14%
Modulus of Elasticity
13%
Polycrystalline
13%
Width
10%
Increasing
10%
Frequencies
10%
Temperature
8%
Etching
7%
Area
7%
Electric Potential
6%
Frequency Shift
6%
Vapor Deposition
6%
X Ray Diffraction
6%
Wafer
6%
Crystal Structure
6%
Boron
6%
Mixing
6%
Spacing
6%
Displacement
6%
Platinum
6%
Diameters
6%
Pressure
5%
Material Science
Silicon Carbide
80%
Resonator
60%
Electrode
30%
Devices
27%
Young's Modulus
21%
Silicon
20%
Vapor
20%
Electronics
20%
Single Crystal
20%
Microelectromechanical System
20%
Sensor
18%
Piezoelectricity
13%
Temperature
13%
Material
11%
Platinum
10%
Thin Films
8%
Boron
6%
Chemical Vapor Deposition
6%
Crystal Structure
6%
X-Ray Diffraction
6%
Aluminum
6%
Zirconium Titanate
6%
Impedance
6%
Accelerometer
6%
Engineering
Silicon
60%
Actuation
43%
Microelectromechanical System
20%
Integration
20%
Environment
20%
Resonant Frequency
20%
Mixing
13%
Fabrication
11%
Beam
10%
Design
8%
Aluminum
8%
Thin Films
8%
Amplitudes
6%
Frequency Shift
6%
Electric Potential
6%
Pressure Probe
6%
Output Signal
5%
Bridges
5%
Hole Radius
5%
Ring Radius
5%
Central Hole
5%