Integration of Microelectromechanical Systems (MEMS) with Electronics in Silicon Carbide for harsh environment

Research output

Research output per year 2006 2006 2008 2009 2010 2012

• 12 Article
• 1 Conference contribution
• 1 Literature review

Research output per year

Research output per year

Search results

• 2012

  Electrothermally Actuated Silicon Carbide Tunable MEMS Resonators

  Mastropaolo, E., Wood, G., Gual, I., Parmiter, P. & Cheung, R., Aug 2012, In: Journal of Microelectromechanical Systems. 21, 4, p. 811-821 11 p.

  Research output: Contribution to journal › Article › peer-review

  Open Access

  File

  • Silicon Carbide 100%
  • Resonator 100%
  • Microelectromechanical System 100%
  • Silicon 100%
  • Mixing 66%
• 2010

  Piezoelectrically driven silicon carbide resonators

  Mastropaolo, E., Gual, I., Wood, G., Bunting, A. & Cheung, R., 29 Nov 2010, In: Journal of Vacuum Science and Technology B. 28, 6, p. C6N18-C6N23 6 p.

  Research output: Contribution to journal › Article › peer-review

  • Silicon Carbide 100%
  • Electrode 100%
  • Resonator 100%
  • Devices 66%
  • Piezoelectricity 66%

• Electro-thermal behaviour of Al/SiC clamped-clamped beams

  Mastropaolo, E., Wood, G. & Cheung, R., Apr 2010, In: Microelectronic Engineering. 87, 4, p. 573-575 3 p.

  Research output: Contribution to journal › Article › peer-review

  • Silicon Carbide 100%
  • Aluminium 100%
  • Vibration 100%
  • Behavior 100%
  • Electrodes 80%

• Silicon carbide electrothermal mixer-filters

  Mastropaolo, E., Gual, I. & Cheung, R., 7 Jan 2010, In: Electronics Letters. 46, 1, p. 62-63 2 p.

  Research output: Contribution to journal › Article › peer-review
• 2009

  Electrothermal actuation studies on silicon carbide resonators

  Cheung, R., 7 Dec 2009, In: Journal of Vacuum Science and Technology B. 26, 6, p. 2619-2623 5 p.

  Research output: Contribution to journal › Article › peer-review

  • Silicon Carbide 100%
  • Resonator 100%
  • Silicon 100%
  • Actuation 100%
  • Electrodes 83%

• Electrothermal actuation of silicon carbide ring resonators

  Mastropaolo, E., Cheung, R., Henry, A. & Janzen, E., Nov 2009, In: Journal of Vacuum Science and Technology B. 27, 6, p. 3109-3114 6 p.

  Research output: Contribution to journal › Article › peer-review

  • Silicon 100%
  • Actuation 100%
  • Silicon Carbide 100%
  • Resonant Frequency 50%
  • Resonant Frequencies 50%

• A review of silicon carbide development in MEMS applications

  Jiang, L. & Cheung, R., 2009, In: Computational Materials Science. 2, p. 227-242

  Research output: Contribution to journal › Literature review › peer-review

  • Utilization 100%
  • Silicon Carbide 100%
  • Microelectromechanical System 100%
  • Area 25%
  • Material 25%

• Fabrication of beam resonators from hot-wall chemical vapour deposited SiC

  Mastropaolo, E., Cheung, R., Henry, A. & Janzén, E., 2009, In: Microelectronic Engineering. 86, 4-6, p. 1194-1196 3 p.

  Research output: Contribution to journal › Article › peer-review

  • Resonator 100%
  • Single Crystals 100%
  • Vapor 100%
  • Single Crystal 100%
  • Polycrystalline 66%
• 2008

  Single crystal and polycrystalline 3C-SiC for MEMS applications

  Henry, A., Janzen, E., Mastropaolo, E. & Cheung, R., 7 Sept 2008, 7th European Conference on Silicon Carbide and Related Materials.

  Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

• Micro-scale Sensors based in Silicon Carbide and Silicon

  Cheung, R. & Argyrakis, P., 2008, In: Proceedings of the Institution of Mechanical Engineers, Part C: Journal of Mechanical Engineering Science. p. 19-26 8 p.

  Research output: Contribution to journal › Article › peer-review

• 2007

  Mechanical properties of a 3C-SiC layer between RT and 600 ºC

  Pozzi, M., Hassan, M., Harris, A. J., Burdess, J. S., Lee, K. K., Cheung, R., Zorman, C. A. & Mehregany, M., 2007, In: Journal of Physics D: Applied Physics. 2007, 40, p. 3335-3342 8 p.

  Research output: Contribution to journal › Article › peer-review

• 2006

  Fabrication of Hall Device Structures in 3C-SiC using Micro-electro-mechanical Processing Technology

  Anderson, S., Jiang, L., Cheung, R., Zorman, C. A. & Mehregany, M., 2006, In: Microelectronic Engineering. 83, p. 1396-1399 4 p.

  Research output: Contribution to journal › Article › peer-review

• Relaxation of process-induced surface stress in amorphous silicon carbide thin films using low energy ion bombardment

  Argyrakis, P., Snell, A. J. & Cheung, R., 2006, In: Applied Physics Letters. 89, p. 034101-1-3

  Research output: Contribution to journal › Article › peer-review

• SiC cantilever resonators with electrothermal actuation

  Jiang, L., Cheung, R., Hedley, J., Hassan, M., Harris, A. J., Burdess, J. S., Zorman, C. A. & Mehregany, M., 2006, In: Sensors and Actuators A: Physical. 128, p. 376-386 11 p.

  Research output: Contribution to journal › Article › peer-review