Integration of Microelectromechanical Systems (MEMS) with Electronics in Silicon Carbide for harsh environment

Research output

Research output per year 2006 2006 2008 2009 2010 2012

• 12 Article
• 1 Conference contribution
• 1 Literature review

Research output per year

Research output per year

Search results

• 2008

  Single crystal and polycrystalline 3C-SiC for MEMS applications

  Henry, A., Janzen, E., Mastropaolo, E. & Cheung, R., 7 Sept 2008, 7th European Conference on Silicon Carbide and Related Materials.

  Research output: Chapter in Book/Report/Conference proceeding › Conference contribution