Integration of Microelectromechanical Systems (MEMS) with Electronics in Silicon Carbide for harsh environment

Cheung, Rebecca (Principal Investigator)

School of Engineering

12 Article
1 Conference contribution
1 Literature review

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2009
A review of silicon carbide development in MEMS applications
Jiang, L. & Cheung, R., 2009, In: Computational Materials Science. 2, p. 227-242
Research output: Contribution to journal › Literature review › peer-review