manufacturability of Monolithic, Ferromagentic Core, Power Inductors

Status	Finished
Effective start/end date	1/12/06 → 30/11/11

Test Structures for the Wafer Mapping and Correlation of the Properties of Electroplated Ferromagnetic Alloy Films
Sirotkin, E., Smith, S., Walker, R., Terry, J. & Walton, A., 21 Jun 2016, In: IEEE Transactions on Semiconductor Manufacturing. p. 201-208
Research output: Contribution to journal › Article › peer-review

Open Access
File
Correlation of optical and electrical test structures for characterisation of copper self-annealing
Murray, J., Smith, S., Schiavone, G., Terry, J. G., Mount, A. R. & Walton, A. J., 1 Mar 2012, Microelectronic Test Structures (ICMTS), 2012 IEEE International Conference on. p. 152 -158
Research output: Chapter in Book/Report/Conference proceeding › Conference contribution
Quantitative wafer mapping of residual stress in electroplated NiFe films using independent strain and Young's modulus measurements
Schiavone, G., Desmulliez, M. P. Y., Smith, S., Murray, J., Sirotkin, E., Terry, J. G., Mount, A. R. & WaIton, A. J., 2012, IEEE International Conference on Microelectronic Test Structures. NEW YORK: Institute of Electrical and Electronics Engineers, p. 105 -110 6 p.
Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

NiFe magnetic alloy test structures data
Smith, S. (Creator), Sirotkin, E. (Creator) & Walker, R. (Creator), Edinburgh DataShare, 20 Jun 2016
DOI: 10.7488/ds/1427, http://hdl.handle.net/10283/2035
Dataset

Project Details