Research output per year
Research output per year
Research output
- 5 Article
Search results
-
2009
A study of defect evolution in multi-energy helium implanted monocrystalline and polycrystalline silicon
Abrams, K. J., Donnelly, S. E., Beaufort, M-F., Terry, J., Haworth, L. I. & Alquier, D., Aug 2009, In: Physica Status Solidi (C). 6, 8, p. 1964-1968 5 p.Research output: Contribution to journal › Article › peer-review
-
2007
Modification of He Implantation Induced Defects using Fluorine Co-implantation.
Alquier, D., Gaudin, G., Beaufort, M. F., Donnelly, S. E., Haworth, L. & Cayrel, F., 2007, In: Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms. 257, p. 240-243 4 p.Research output: Contribution to journal › Article › peer-review
-
2003
The use of Cavities for Getting in Silicon Microelectronic Devices
Donnelly, S. E., Vishnyakov, V. M., Carter, G., Terry, J., Haworth, L., Sermanni, P. & Birtcher, R. C., 2003, In: Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms. 206, p. 422-426 5 p.Research output: Contribution to journal › Article › peer-review
-
2002
Incorporation of Helium-implant-induced Cavities Near the Active Regions of Metal-oxide-semiconductor Devices: Effects on dc Electrical Characteristics
Terry, J., Haworth, L. I., Gundlach, A. M., Stevenson, T., Vishnyakov, V. M. & Donnelly, S. E., 1 Feb 2002, (E-pub ahead of print) In: Journal of Vacuum Science and Technology B. 20, 1, p. 306-310 5 p.Research output: Contribution to journal › Article › peer-review
-
Helium Bubble Growth in Silicon: Ripening or Bubble Motion and Coalescence?
Vishnyakov, V. M., Donnelly, S. E., Carter, G., Birtcher, R. C. & Haworth, L., 2002, In: Solid State Phenomena. 82-84, p. 267-272 5 p.Research output: Contribution to journal › Article › peer-review