Platform Grant to Support the Development of Micro/Nano Technology Across a range of Disciplines

  • Walton, Anthony (Principal Investigator)
  • Cheung, Rebecca (Co-investigator)
  • Ewen, Peter (Co-investigator)
  • Haworth, Leslie (Co-investigator)
  • Snell, Tony (Co-investigator)
  • Stevenson, Tom (Co-investigator)
  • Underwood, Ian (Co-investigator)

Project Details

Description

The platform grant has been used to develop key technologies that were strategically important for the Research Group to implement to support future reseach. These include wafer bonding (with buried layers) and the associated wafer thinning to provide projects with access to custom wafers
which are very difficult to procure in small quantities. The other capability developed has been the technology to post-process individual chips based
upon the very successful post-processing of full silicon wafers. The funding was also used to provide the group with the resources to make better use of existing
capabilities, pump-prime new and adventurous research projects and travel resources that will enable staff spend more time visiting other research
establishments and developing international collaborations

Layman's description

Integrated circuit are a rapidly developing technology and this funding was provided to provide a platform for the research group to develop processes that would enable the development of technologies that provide opportunities for creatingdevices with increased functionality. The funding was also used to provide the group with the resources to make better use of existing
capabilities, pump-prime new and adventurous research projects and travel resources that will enable staff spend more time visiting other research
establishments and developing international collaborations

Key findings

Research Achievements in the area supported by the Platform Grant over the three years included thefollowing achievements:
· 450 and 850mm Transition Edge Sensor (TES) world class bolometer arrays [12, 25].
· Fabrication of the first ElectroWetting Of Dielectric (EWOD) arrays on silicon [3].
· Fabrication of the world’s first transistor fabricated with an organometallic Pt gate [28].
· Fabrication and demonstration of an in vitro ocular drug delivery system (including wireless power and data transfer) [4]
· Demonstration of an electrically controlled Holliday junction switch and target free detection (patent applied).
· Development of techniques for the efficient functionalisation of carbon nanotubes [38]
· Demonstration of self-assembly and molecular stamping technology for the high-yield production of CNT transistors [20]
· First demonstration of RF resonators tuned by the movement of silver [17].
· World’s first demonstration of electrical test structures for PSM characterisation [6,15].
· 1GW MEMS ‘patch clamp’ for electrical connections to nerve cells.
· Fabrication of MEMS metal stress sensor for on-wafer monitoring [8, 14]
· Fabrication of array structures for X-ray optics using deep silicon etching
Publications
1. S. Enderling,, C.L. Brown, S. Smith, M.H. Dicks, J.T.M
Stevenson, M.Mitkova, M.N. Kozicki, A.J. Walton; "Sheet
Resistance Measurement of Non-Standard Cleanroom
Materials Using Suspended Greek Cross Test Structures",
IEEE Trans Semiconductor Manufacturing, 19, No 1, pp. 2-9,
Feb 2006.
2. H. Lin, A.J. Walton, C.C. Dunare, J.T.M. Stevenson, A.M.
Gundlach, S. Smith, A.S. Bunting; "Test Structures for the
Characterisation of MEMS and CMOS Integration
Technology", IEEE ICMTS, pp. 143-148, 6-9th March 2006.
3. Y. Li, P. Li, A Kazantzis, L.I. Haworth, A W S Ross, J G Terry,
J T M Stevenson, A M Gundlach, A. Bunting, A.J. Walton;
"Building EWOD microfluidic array technology on top of
foundry CMOS", IEE Seminar on MEMS Sensors and
Actuators, 27-28 April 2006.
4. J.T.M Stevenson, S. Smith, T.B. Tang, A.F. Murray, B.W.
Flynn, H.M. Reekie, D.R. Renshaw, B. Dhillon, A. Ohtori, Y.
Inoue, A.J. Walton; "Miniaturised MEMS drug delivery system
with RF power transfer and communication", IEE Seminar on
MEMS Sensors and Actuators, 27-28 April 2006.
5. B.J.R. Shulver, A.S. Bunting, A.M. Gundlach, L.I. Haworth,
A.W.S. Ross, A.J. Snell, J.T.M. Stevenson, A.J. Walton, R.A.
Allen, M .W. Cresswell; "Design and Fabrication of a Copper
Test Structure for us e as an Electrical Critical Dimension
Reference", IEEE ICMTS, pp. 124-129, 6-9th March 2006.
6. S. Smith, A. Tsiamis, M. McCallum, A.C. Hourd, J.T.M.
Stevenson, A.J. Walton; "Comparison of Optical and
Electrical Measurement Techniques for CD Metrology on
Alternating Phase-Shifting Masks", IEEE ICMTS, pp. 119-
123, 6-9th March 2006.
7. C.J. Wilson, A.B. Horsfall, A.G. O'Neill, N.G. Wright, K. Wang,
S.J. Bull, J.G. Terry, A.J. Walton; "Direct measurement of
electromigration induced stress in interconnect structure",
IRPS 2006, March 26-30th, 2006.
8. J.M.M. dos-Santos, K. Wang, A.B. Horsfall, J.C. Prata Pina,
N.G. Wright, A.G. O'Neill, S.M. Soare, S.J. Bull, J.G. Terry,
A.J. Walton, A.M. Gundlach, J.T.M. Stevenson; "Calibration
and optimization of interconnect based MEMS test structures
for predicting thermo mechanical stress in metallization",
IEEE Transactions on Device and Material Reliability, 5, pp.
713-719, 2006.
9. S. Anderson, L. Jiang, R. Cheung, C.A. Zorman, M.
Mehregany; "Fabrication of Hall Device Structures in 3C-SiC
using Micro-electro-mechanical Processing Technology",
Microelectronic Engineering, 2006
10. L. Jiang, R. Cheung, J. Hedley, M. Hassan, A.J. Harris, J.S.
Burdess, C.A. Zorman, M. Mehregany; "SiC cantilever
resonators with electrothermal actuation", Sensors and
Actuators A, 2006
11. H. Lin, J.T.M. Stevenson, A.M. Gundlach, C.C. Dunare, A.J.
Walton; "Application of CMP for Integrating MEMS and
CMOS Technology", 16th MME - MicroMechanics Europe
Workshop, pp. 207-210, 2005.
12. A.J. Walton et al; "Prototype Detector Technology for the
SCUBA-2 Sub-millimetre Bolometer Array", Journal of
Nanoengineering and Nanosystems: Proc IMechE Part N,
219, pp. 11-21, 2005.
13. W. Parkes, M.D. Audley, D. Bintley, H. McGregor, M.
MacIntosh, A. Ruthven, R. Sudiwala, A.J. Walton; "Packaging
the SCUBA-2 large sensor array for an astronomical
Telescope", Microsystems Technology, pp. 463-470, 2005.
14. J.G Terry, S. Smith, A.J Walton, A.M Gundlach, J.T.M
Stevenson, A.B Horsfall, K. Wang, J.M.M dos Santos, S.M
Soare, N.G Wright, A.G O Neill, S.J. Bull; "Test Chip for the
Development and Evaluation of Test Structures for Measuring
Stress in Metal Interconnect", IEEE Trans on Semiconductor
Manufacturing, pp. 255-261, May 2005.
15. S. Smith, M. McCallum, A.J. Walton, J.T.M. Stevenson, L.
Jiang; "Test Structures for CD and Overlay Metrology in
Alternating Aperture Phase-Shifting Masks", IEEE Trans on
Semiconductor Manufacturing, pp. 238-245, May 2005.
16. S.A.G. Evans, J.G. Terry, N.O.V. Plank, A.J. Walton, L.M.
Keane, C.J. Campbell, P. Ghazal, J.S. Beattie, T-J Su, J.
Crain, A.R. Mount ; "Electrodeposition of platinum metal on
TiN thin films", Electrochemical Communications, pp. 125-
129, 2005.
17. S. Enderling, C.L. Brown, M. Balakrishnan, M. Mitkova, J.
Hedley, M.N. Kozicki, A.J. Walton; "On the integration of a
novel tunable silver deposit into MEMS surface
micromachined resonators", 18th IEEE Conference on Micro
Electro Mechanical Systems (MEMS 05), pp. 159 - 162, 30th
Jan - 3rd Feb 2005.
18. L. Jiang, M. Hassan, R. Cheung, A.J. Harris, J.S. Burdess,
C.A. Zorman, M. Mehregany; "Dry release fabrication and
testing of SiC electrostatic cantilever actuators",
Microelectronic Engineering, 78-79, 106-111, 2005
19. P. Argyrakis, L.S.W. Teo, J.T.M. Stevenson, R. Cheung;
"Fabrication of PDMS Stamps for the Patterned Growth of
Carbon Nanotubes", Microelectronic Engineering, 78-79, 647-
652, 2005
20. N.O.V. Plank, M. Ishida, R. Cheung; "Positioning of carbon
nanotubes using soft-lithography for electronics applications",
Journal of Vacuum Science and Technology B, 2005
21. N.O.V. Plank, G.A. Forrest, R. Cheung, A.J. Alexander; "Ntype
carbon nanotube devices prepared by CF4 plasmafluorination
and amino-functionalization", Journal of Physical
Chemistry B, 109, 22096-22101, 2005
22. R. Cheung; "Fabrication and Characterisation of 3C-SiC
resonators", International Topical Workshop on Heteroepitaxy
of 3C-SiC on Silicon and its Application to Sensor Devices,
April 2005
23. M. Ahmadian, B.W. Flynn, A.F. Murray, D.R.S. Cumming;
"Data Transmission for Implantable Microsystems using
Magnetic Coupling", IEE Proceedings on Communications,
152, 2, 247-250, April 2005
24. Y. Lee, J Gourley, W.J. Hossack, I. Underwood, A.J. Walton;
"Modelling of binary phase modulation in surface stabilized
ferroelectric liquid crystal spatial light modulators",
Microelectronics Journal, 35, pp. 193-102, 2004.
25. A.J. Walton et al; "Design and fabrication of the detector
technology for SCUBA-2", IEE Proceedings on Science,
Measurement and Technology, 151, No 2, pp. 110-120, 2004.
26. Y. Lee, J Gourley, W.J. Hossack, I. Underwood, A.J. Walton;
"Multi-phase modulation for nematic liquid crystal on silicon
backplane", Optics Communications, 236, pp. 313-322,
2004..
27. A.J. Walton, J.G. Terry, A.W.S Ross, S. Smith, A. Bunting,
J.T.M. Stevenson, L. Peng, S.A.G. Evans, A.R. Mount, T-J.
Sub, J. Crain, L.M. Keane, C.J. Campbell, J.S. Beattie, P.
Ghazal; "Integrating Micro and Nanotechnology with the Bio
World", NanoMed 2004 - 4th International Workshop on
Biomedical Applications of Nanotechnology, pp. 5-8, 14-15th
Oct, 2004.
28. M.H. Dicks, G.M. Broxton, J. Thomson, J. Lobban, A.M.
Gundlach, J.T.M. Stevenson, A.J. Walton ; "A test chip to
characterise P-MOS transistors produced using a novel
organometallic material", IEEE ICMTS, pp. 183-187, March
22-25, 2004.
29. D. Audley, W.S. Holland, T. Hodson, M.J. MacIntosh, I.
Robson, K.D. Irwin, G.C. Hilton, W.D. Duncan, W. Parkes,
A.J. Walton, P. Ade, I. Walker, M. Fich, M. Halpern, D.A.
Naylor, D. Mitcell, P. Bastien; "An update on the SCUBA-2
project", SPIE Conference on Astronomical Telescopes and
Instrumentation (invited paper), 5498, pp. 63-77, 21-25 June
2004.
30. A.B. Horsfall, K. Wang, J.M.M. dos-Santos, S.M. Soare, N.G.
Wright, A.G. O'Neill, S.J. Bull, J.G. Terry, A.J. Walton, A.M.
Gundlach, J.T.M. Stevenson; "Dependence of Process
Parameters on Stress Generation in Aluminum Thin Films",
IEEE Transactions on Device and Material Reliability, 4, No 3,
pp. 482-487 , Sept 2004.
31. W. D. Duncan, et al; "SCUBA-2: Arrays to Systems
Interfaces", Nuclear Inst. and Methods in Physics Research,
A, 520, pp. 427-430, 2004.
32. M. D. Audley et al, "SCUBA-2: A Large Format TES Array for
Submillimetre Astronomy", Nuclear Inst. and Methods in
Physics Research, A, 520, pp. 479-483, 2004.
33. D. Audley, W.D. Duncan, W.S. Holland, A.J. Walton, W.
Parkes, C.C. Dunare, A.M. Gundlach, J.T.M. Stevenson, K.D.
Irwin, G.C. Hilton, E. Schulte, P.A.R. Ade, C. Tucker;
"Fabrication of the SCUBA-2 detector arrays", Nuclear Inst.
and Methods in Physics Research, A , 520, pp. 483-486,
2004.
34. A.J. Walton, W. Parkes, C.C. Dunare, J.T.M. Stevenson, A.M.
Gundlach, G. Hilton, J.N. Ullom, K.D. Irwin, W.S. Holland,
W.D. Duncan, M.D. Audley, P.A.R. Ade, R. Sudiwala, E.
Schulte; "Design and fabrication of the detector technology for
SCUBA-2", IEE Proceedings on Science, Measurement and
Technology, 151, No 2, pp. 110-120, 2004.
35. K. Petkov, R. Todorov, D. Kozhuharova, L. Tichy, E.
Cernoskova and P.J.S. Ewen, “Changes in the
physicochemical and optical properties of chalcogenide thin
films from the systems As-S and As-S-Tl”, J. Materials
Science, 39, 3 pp. 961-968, 2004.
36. L. Jiang, N.O.V. Plank, R. Cheung, M.A. Blauw, E. van der
Drift; "Dry etching of SiC in inductively coupled Cl2/Ar
plasma", Journal of Physics D; Applied Physics, 2004
37. L. Jiang, R. Cheung; "Impact of Ar addition to inductively
coupled plasma etching of SiC in SF6/O2", Microelectronic
Engineering, 73-74, 306-311, 2004
38. N.O.V. Plank, R. Cheung; "Functionalization of carbon
nanotubes for molecular electronics", Microelectronic
Engineering, 73-74, 578-582, 2004
39. N.O.V. Plank, R. Cheung, R.J. Andrews; "Thiolation of singlewall
carbon nanotubes and their self-assembly", Applied
Physics Letters, 2004
40. P. Argyrakis, L.S.W. Teo, J.T.M. Stevenson, R. Cheung;
"Fabrication of PDMS Stamps for the Patterned Growth of
Carbon Nanotubes", International Conference on Micro- and
Nano- Engineering, Sept. 2004
41. N.O.V. Plank, R. Cheung; "Functionalisation of carbon
nanotubes in a plasma", NT'04, July, 2004
42. E.A. Johannessen, L. Wang, L. Cui, T.B. Tang, M. Ahmadian,
A. Astaras, S.W. Reid, P. Yam, A.F. Murray, B.W. Flynn, S.P.
Beaumont, D.R.S. Cumming, J.M. Cooper; "Implementation
of Multichannel Sensors for remote biomedical measurement
in a Microsystems Format", IEEE Transactions on Biomedical
Engineering, 51, 3, 525 -535, March 2004
43. E.A. Johannessen, L. Wang, L. Cui, T.B. Tang, M. Ahmadian,
A. Astaras, S.W. Reid, P. Yam, A.F. Murray, B.W. Flynn, S.P.
Beaumont, D.R.S. Cumming, J.M. Cooper; "Implementation
of Distributed Sensors in a Microsystem Format", IEEE
Transactions on Biomedical Engineering, 51, 3, 525-535,
March 2004
44. Y.M. Lee, W. Parkes, G. Bodammer, I. Underwood,
"Characterisation of inter-metal dielectric deposition
processes on CMOS backplanes for liquid crystal on silicon
microdisplays", IEE Proc. J. Optoelectronics, Vol. 151, No.1,
2004.
45. P.J.S. Ewen, “Applications of the Photodissolution Effect in
Chalcogenide Glasses”, in “Photo-induced Metastability in
Amorphous Semiconductors”, Ed. A.V. Kolobov (Wiley -VCH)
pp.365-382, 2003.
46. S. Smith, A.J. Walton, S. Bond, A.W.S. Ross, G.K.H.
Bodammer, J.T.M. Stevenson, A.M. Gundlach; "The Electrical
Characterisation of Platinum Resistor Deposited by Focused
Ion Beam", IEEE Transactions on Semiconductor
Manufacturing, pp. 199-206, May 2003.
47. S. Smith, M. McCallum, A.J. Walton, J.T.M. Stevenson, A.
Lissimore; "Comparison of Electrical and SEM CD
measurement of Binary and alternating aperture phase shift
masks", IEEE Transactions on Semiconductor Manufacturing,
pp. 266-272, May 2003.
48. A.B. Horsfall, J.M.M. dos Santos, S.M. Soare, N.G. Wright,
A.G. O'Neil, S.J. Bull, A.J. Walton , A.M. Gundlach, J.T.M.
Stevenson; "Direct measurement of residual stress in submicron
interconnects", Semiconductor Science and
Technology, 18, pp. 992-996, 2003.
49. N.O.V. Plank, M.A. Blauw, E. van der Drift, R. Cheung; "The
etching of silicon carbide in inductively coupled SF6/O2
plasma", Journal of Physics D; Applied Physics, 36, 482-487,
2003
50. L. Jiang, R. Cheung, R. Brown, A. Mount; "Inductively
coupled plasma etching of SiC in SF6/O2 and etch-induced
surface chemical bonding modifications", Journal of Applied
Physics, 93, 1376-1383, 2003
51. N.O.V. Plank, L. Jiang, R. Cheung; "Fluorination of carbon
nanotubes in CF4 plasma", Appl. Phys. Lett., 83, 2426-2428,
2003
52. N.O.V. Plank, L. Jiang, A.M. Gundlach, R. Cheung; "The
Electrical Characteristics of 4H-SiC Schottky Diodes after ICP
etching", Journal of Electronic Materials, 32, 964-971, 2003
53. R. Cheung, B. Rong, E. van der Drift, W.G. Sloof; "Etch
mechanism and etch-induced effects in the inductively
coupled plasma (ICP) etching of GaN", Journal of Vacuum
Science and Technology, B21, 1268-1272, 2003
54. L. Jiang, N.O.V. Plank, R. Cheung; "Surface characterisation
of inductively coupled plasma etched SiC in SF6/O2",
Microelectronic Engineering, 67-68, 369-375, 2003
55. L. Jiang, R. Cheung, M. Hassan, A.J. Harris, J.S. Burdess,
C.A. Zorman, M. Mehregany; "Fabrication of SiC microelectro-
mechanical systems (MEMS) using one-step dry
etching", Journal of Vacuum Science and Technology, B21,
2998-3002, 2003
56. L. Jiang, R. Cheung; "Inductively coupled plasma etching of
SiC using SF6/O2/Ar gas mixtures", Micro-Nano-Engineering,
Sept 2003
57. M. Ahmadian, B.W. Flynn, A.F. Murray, D.R.S. Cumming;
"Miniature transmitter for implantable micro system ", IEEE
Engineering in Medicine and Biology Society , 4, 3028-3031,
Sept 2003
58. L. Wang et al; "Networked Wireless Microsystem for Remote
Gastrointestinal Monitoring", IEEE Transducers, Solid-state
Sensors, Actuators and Microsystems, 2, 1184-1187, June
2003
StatusFinished
Effective start/end date1/12/0330/11/06

Funding

  • EPSRC: £426,895.00