3um Pitch, 1um Active Diameter SPAD Arrays in 130nm CMOS Imaging Technology

Ziyang you, Luca Parmesan, Sara Pellegrini, Robert Henderson

Research output: Contribution to conferencePaperpeer-review

Abstract / Description of output

A shared well 4x4 SPAD array test structure with
3um pitch is realized in a 130nm CMOS image sensor technology.
The SPADs have 150Hz median DCR at room temperature at 1V
excess bias, 15% peak PDP and 176ps FWHM timing jitter both
at 3V excess bias.
Original languageEnglish
Number of pages4
Publication statusPublished - 2 Jun 2017
EventInternational Image Sensor Workshop 2017 - Hiroshima, Japan
Duration: 30 May 20172 Jun 2017

Workshop

WorkshopInternational Image Sensor Workshop 2017
Abbreviated titleIISW 2017
Country/TerritoryJapan
CityHiroshima
Period30/05/172/06/17

Fingerprint

Dive into the research topics of '3um Pitch, 1um Active Diameter SPAD Arrays in 130nm CMOS Imaging Technology'. Together they form a unique fingerprint.

Cite this