Abstract
We present the design and application of a 64\times 64 pixel SPAD array to portable colorimetric sensing, and fluorescence and x-ray imaging. The device was fabricated on an unmodified 180 nm CMOS process and is based on a square p+/n active junction SPAD geometry suitable for detecting green fluorescence emission. The stand-alone SPAD shows a photodetection probability greater than 60% at 5 V excess bias, with a dark count rate of less than 4 cps/ \mu \text{m}^{\mathbf {2}} and sub-ns timing jitter performance. It has a global shutter with an in-pixel 8-bit counter; four 5-bit decoders and two 64-to-1 multiplexer blocks allow the data to be read-out. The array of sensors was able to detect fluorescence from a fluorescein isothiocyanate (FITC) solution down to a concentration of 900 pM with an SNR of 9.8 dB. A colorimetric assay was performed on top of the sensor array with a limit of quantification of 3.1~\mu \text{m}. X-rays images, using energies ranging from 10 kVp to 100 kVp, of a lead grating mask were acquired without using a scintillation crystal.
Original language | English |
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Article number | 8713497 |
Pages (from-to) | 7319-7327 |
Number of pages | 9 |
Journal | IEEE Sensors Journal |
Volume | 19 |
Issue number | 17 |
Early online date | 13 May 2019 |
DOIs | |
Publication status | Published - 1 Sept 2019 |
Keywords / Materials (for Non-textual outputs)
- CMOS
- image sensor
- low-light (vision)
- photo detector
- Single photon avalanche diode
- SPAD
- x-rays