A 64x64 smart pixel array for deformable membrane devices

K. Seunarine, I. Underwood, S. C. Graham, D. G. Vass, M. I. Newsam, J. T. M. Stevenson, A. M. Gundlach, R. J. Woodburn

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Original languageUndefined/Unknown
Title of host publicationProceedings SPIE: Smart structures and Materials 2000: Smart Electronics and MEMS
Number of pages1
Publication statusPublished - 2000

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