Original language | Undefined/Unknown |
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Title of host publication | Proceedings SPIE: Smart structures and Materials 2000: Smart Electronics and MEMS |
Pages | 10 |
Number of pages | 1 |
Publication status | Published - 2000 |
A 64x64 smart pixel array for deformable membrane devices
K. Seunarine, I. Underwood, S. C. Graham, D. G. Vass, M. I. Newsam, J. T. M. Stevenson, A. M. Gundlach, R. J. Woodburn
Research output: Chapter in Book/Report/Conference proceeding › Conference contribution