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A 64x64 smart pixel array for deformable membrane devices

  • K. Seunarine
  • , I. Underwood
  • , S. C. Graham
  • , D. G. Vass
  • , M. I. Newsam
  • , J. T. M. Stevenson
  • , A. M. Gundlach
  • , R. J. Woodburn

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Original languageUndefined/Unknown
Title of host publicationProceedings SPIE: Smart structures and Materials 2000: Smart Electronics and MEMS
Pages10
Number of pages1
Publication statusPublished - 2000

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