A Closed Cavity Ultrasonic Resonator Formed by Graphene/PMMA Membrane for Acoustic Application

Jing Xu*, Graham Wood, Enrico Mastropaolo, Peter Lomax, Michael J. Newton, Rebecca Cheung

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

Abstract / Description of output

A graphene/poly(methyl methacrylate) (PMMA) closed cavity resonator with a resonant frequency at around 160 kHz has been fabricated. A six-layer graphene structure with a 450 nm PMMA laminated layer has been dry-transferred onto the closed cavity with an air gap of 105 μm. The resonator has been actuated in an atmosphere and at room temperature by mechanical, electrostatic and electro-thermal methods. The (1,1) mode has been observed to dominate the resonance, which suggests that the graphene/PMMA membrane has been perfectly clamped and seals the closed cavity. The degree of linearity of the membrane's displacement versus the actuation signal has been determined. The resonant frequency has been observed to be tuned to around 4% by applying an AC voltage through the membrane. The strain has been estimated to be around 0.08%. This research puts forward a graphene-based sensor design for acoustic sensing.

Original languageEnglish
Article number810
Number of pages12
JournalMicromachines
Volume14
Issue number4
Early online date1 Apr 2023
DOIs
Publication statusE-pub ahead of print - 1 Apr 2023

Keywords / Materials (for Non-textual outputs)

  • MEMS
  • graphene
  • resonator
  • ultrasound

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