A Graphene-based Capacitive Monolithic Microphone with Minimized Air Gap Thickness

Yun Jiang; Graham Wood; Michael J. Newton; Peter Lomax; Rebecca Cheung

A Graphene-based Capacitive Monolithic Microphone with Minimized Air Gap Thickness

Yun Jiang, Graham Wood, Michael J. Newton, Peter Lomax, Rebecca Cheung

Research output: Contribution to conference › Abstract › peer-review

Abstract / Description of output

We report a graphene-based microelectromechanical systems (MEMS) capacitive microphone with a 1.5 micrometer air gap and a vent hole. The design, fabrication and characterization of the microphone is introduced.

Original language	English
Publication status	Published - 29 May 2024
Event	The 67th International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication - La Jolla, United States Duration: 28 May 2024 → 31 May 2024 https://eipbn.org/

Conference

Conference	The 67th International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication
Abbreviated title	EIPBN
Country/Territory	United States
City	La Jolla
Period	28/05/24 → 31/05/24
Internet address	https://eipbn.org/

Cite this

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title = "A Graphene-based Capacitive Monolithic Microphone with Minimized Air Gap Thickness",

abstract = "We report a graphene-based microelectromechanical systems (MEMS) capacitive microphone with a 1.5 micrometer air gap and a vent hole. The design, fabrication and characterization of the microphone is introduced.",

author = "Yun Jiang and Graham Wood and Newton, {Michael J.} and Peter Lomax and Rebecca Cheung",

year = "2024",

month = may,

day = "29",

language = "English",

note = "The 67th International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication, EIPBN ; Conference date: 28-05-2024 Through 31-05-2024",

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TY - CONF

T1 - A Graphene-based Capacitive Monolithic Microphone with Minimized Air Gap Thickness

AU - Jiang, Yun

AU - Wood, Graham

AU - Newton, Michael J.

AU - Lomax, Peter

AU - Cheung, Rebecca

PY - 2024/5/29

Y1 - 2024/5/29

N2 - We report a graphene-based microelectromechanical systems (MEMS) capacitive microphone with a 1.5 micrometer air gap and a vent hole. The design, fabrication and characterization of the microphone is introduced.

AB - We report a graphene-based microelectromechanical systems (MEMS) capacitive microphone with a 1.5 micrometer air gap and a vent hole. The design, fabrication and characterization of the microphone is introduced.

UR - https://eipbn.org/

M3 - Abstract

T2 - The 67th International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication

Y2 - 28 May 2024 through 31 May 2024

ER -

A Graphene-based Capacitive Monolithic Microphone with Minimized Air Gap Thickness

Abstract / Description of output

Conference

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