A kinetic model for capillary flows in MEMS

Paolo Barbante*, Aldo Frezzotti, Livio Gibelli, Paolo Legrenzi, Alberto Corigliano, Attilio Frangi

*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

A kinetic model for the study of capillary flows in micromechanical devices has been presented. The model is based on the Enskog-Vlasov kinetic equation and provides a reasonable description of two-phase flows and of fluid-surface interaction. The structure of liquid menisci between two hydrophilic walls has been studied and our results agree fairly well with the Laplace-Kelvin equation. Meniscus breakage has been computed and a possible explanation of the phenomenon has been given.

Original languageEnglish
Title of host publication28th International Symposium on Rarefied Gas Dynamics 2012
Pages713-719
Number of pages7
Volume1501
Edition1
DOIs
Publication statusPublished - 1 Dec 2012
Event28th International Symposium on Rarefied Gas Dynamics 2012, RGD 2012 - Zaragoza, Spain
Duration: 9 Jul 201213 Jul 2012

Conference

Conference28th International Symposium on Rarefied Gas Dynamics 2012, RGD 2012
Country/TerritorySpain
CityZaragoza
Period9/07/1213/07/12

Keywords

  • Capillary flows
  • DSMC
  • Enskog-Vlasov equation
  • MEMS

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