Abstract We report on the design of a two-port ring microelectromechanical (MEMS) resonator with electrothermal actuation and piezoelectric sensing for filtering applications. The ring resonator has been fabricated in silicon carbide with top platinum electrothermal actuator and lead zirconium titanate piezoelectric sensor. The transmission frequency response measurements have shown that the device with a ring radius of 200 μm resonate in the frequency range 0.4 MHz – 0.6 MHz, in the presence of tuning. By applying DC bias voltage in the range 4 V – 10 V, a frequency tuning range of 330,000 ppm has been achieved.
|Number of pages||4|
|Publication status||Published - 2014|
|Event||EUROSENSORS 2014, the 28th European Conference on Solid-State Transducers - , Italy|
Duration: 7 Sep 2014 → 10 Sep 2014
- ring resonator
- electrothermal actuation
- piezoelectric sensing