A MEMS Filter Based on Ring Resonator with Electrothermal Actuation and Piezoelectric Sensing

Boris Sviličić, Enrico Mastropaolo, Rebecca Cheung

Research output: Contribution to journalArticlepeer-review

Abstract

Abstract We report on the design of a two-port ring microelectromechanical (MEMS) resonator with electrothermal actuation and piezoelectric sensing for filtering applications. The ring resonator has been fabricated in silicon carbide with top platinum electrothermal actuator and lead zirconium titanate piezoelectric sensor. The transmission frequency response measurements have shown that the device with a ring radius of 200 μm resonate in the frequency range 0.4 MHz – 0.6 MHz, in the presence of tuning. By applying DC bias voltage in the range 4 V – 10 V, a frequency tuning range of 330,000 ppm has been achieved.
Original languageEnglish
Pages (from-to)1406-1409
Number of pages4
JournalProcedia Engineering
Volume87
Issue number0
DOIs
Publication statusPublished - 2014
EventEUROSENSORS 2014, the 28th European Conference on Solid-State Transducers - , Italy
Duration: 7 Sep 201410 Sep 2014

Keywords

  • MEMS
  • filter
  • ring resonator
  • electrothermal actuation
  • piezoelectric sensing
  • tuning

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