A modified Gaudi structure for the optimisation of the focus and exposure of wafer steppers

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Original language	Undefined/Unknown
Title of host publication	Proceedings 1994 IEEE International Conference on Microelectronic Test Structures
Pages	4
Number of pages	1
Publication status	Published - 1994

Cite this

@inproceedings{16201240a4dd4d9e8a278b5e902f7d4a,

title = "A modified Gaudi structure for the optimisation of the focus and exposure of wafer steppers",

author = "Walton, \{A. J.\} and M. Fallon and Stevenson, \{J. T. M.\} and Ross, \{A. W. S.\} and Reeves, \{C. M.\}",

year = "1994",

language = "Undefined/Unknown",

pages = "4",

booktitle = "Proceedings 1994 IEEE International Conference on Microelectronic Test Structures",

}