A Novel process for silicide formation using dynamic recoil mixing

L. I. Haworth, A. E. Hill, R. J. Holwill, R. Pilkington, J. M. Robertson

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Original languageUndefined/Unknown
Title of host publicationESSDERC 87
Pages4
Number of pages1
Publication statusPublished - 1987

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