A novel thin-mirror trench-fill technique for the manufacture of high optical quality LCoS spatial light modulators

K. Seunarine, D. W. Calton, I. Underwood

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Original languageEnglish
Title of host publicationSpatial Light Modulators and Integrated Optoelectronic Arrays
Subtitle of host publicationTechnical Digest
PublisherOptical Society of America
PagesPD3-1 to PD3-3
Number of pages3
ISBN (Print)1-55752-602-8
Publication statusPublished - 1999

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