A novel thin-mirror trench-fill technique for the manufacture of high optical quality LCoS spatial light modulators

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Original language	English
Title of host publication	Spatial Light Modulators and Integrated Optoelectronic Arrays
Subtitle of host publication	Technical Digest
Publisher	Optical Society of America
Pages	PD3-1 to PD3-3
Number of pages	3
ISBN (Print)	1-55752-602-8
Publication status	Published - 1999

Cite this

@inproceedings{f7f8e25eeb01405c94b7b7772ee4ea75,

title = "A novel thin-mirror trench-fill technique for the manufacture of high optical quality LCoS spatial light modulators",

author = "K. Seunarine and Calton, \{D. W.\} and I. Underwood",

year = "1999",

language = "English",

isbn = "1-55752-602-8",

pages = "PD3--1 to PD3--3",

booktitle = "Spatial Light Modulators and Integrated Optoelectronic Arrays",

publisher = "Optical Society of America",

}

A novel thin-mirror trench-fill technique for the manufacture of high optical quality LCoS spatial light modulators. / Seunarine, K.; Calton, D. W.; Underwood, I.
Spatial Light Modulators and Integrated Optoelectronic Arrays: Technical Digest. Optical Society of America, 1999. p. PD3-1 to PD3-3 PD3.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

TY - GEN

T1 - A novel thin-mirror trench-fill technique for the manufacture of high optical quality LCoS spatial light modulators

AU - Seunarine, K.

AU - Calton, D. W.

AU - Underwood, I.

PY - 1999

Y1 - 1999

M3 - Conference contribution

SN - 1-55752-602-8

SP - PD3-1 to PD3-3

BT - Spatial Light Modulators and Integrated Optoelectronic Arrays

PB - Optical Society of America

ER -