Abstract / Description of output
This paper reviews present day test structures and illustrates how they have evolved to a continuously changing technology. Structures for measuring resistivity, contact resistance, feature dimensions and overlay errors are presented as are MEMS (Micro-Electro-Mechanical Systems)/microsystems specific devices.
Original language | English |
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Title of host publication | SMART MATERIALS & MICRO/NANOSYSTEMS |
Editors | P Vincenzini, G Darrigo |
Place of Publication | STAFA-ZURICH |
Publisher | TRANS TECH PUBLICATIONS LTD |
Pages | 356-365 |
Number of pages | 10 |
ISBN (Print) | 978-3-908158-20-2 |
Publication status | Published - 2009 |
Event | 3rd International Conference on Smart Materials, Structures and Systems - Acireale Duration: 8 Jun 2008 → 13 Jun 2008 |
Conference
Conference | 3rd International Conference on Smart Materials, Structures and Systems |
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City | Acireale |
Period | 8/06/08 → 13/06/08 |