A REVIEW OF TEST STRUCTURES FOR CHARACTERISING MICROELECTRONIC AND MEMS TECHNOLOGY

A. J. Walton, S. Smith

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

This paper reviews present day test structures and illustrates how they have evolved to a continuously changing technology. Structures for measuring resistivity, contact resistance, feature dimensions and overlay errors are presented as are MEMS (Micro-Electro-Mechanical Systems)/microsystems specific devices.

Original languageEnglish
Title of host publicationSMART MATERIALS & MICRO/NANOSYSTEMS
EditorsP Vincenzini, G Darrigo
Place of PublicationSTAFA-ZURICH
PublisherTRANS TECH PUBLICATIONS LTD
Pages356-365
Number of pages10
ISBN (Print)978-3-908158-20-2
Publication statusPublished - 2009
Event3rd International Conference on Smart Materials, Structures and Systems - Acireale
Duration: 8 Jun 200813 Jun 2008

Conference

Conference3rd International Conference on Smart Materials, Structures and Systems
CityAcireale
Period8/06/0813/06/08

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