A study of reactive ion etching damage effects in GaN

B. Rong, R. J. Reeves, S. A. Brown, M. M. Alkaisi, E. van der Drift, Rebecca Cheung

Research output: Contribution to journalArticlepeer-review

Original languageUndefined/Unknown
Pages (from-to)585-591
Number of pages7
JournalMicroelectronic Engineering
Volume57
Issue number58
Publication statusPublished - 2001

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