Abstract / Description of output
We present the first reported use of CMOS compatible Single Photon Avalanche Diodes (SPAD) arrays for the detection of accelerated electrons, with the use of 3D- stacked backside illuminated (BSI) SPADs, and a Scanning Electron Microscope (SEM). We detected electrons at electron energies from 5 to 30 keV. This unveils an array of novel application detection opportunities for SPADs in particle radiation environments, taking advantage of their inherent sensitivity and timing capabilities, along with all the usual benefits associated with CMOS devices.
Original language | English |
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Title of host publication | 2018 IEEE SENSORS Proceedings |
Place of Publication | USA |
Publisher | Institute of Electrical and Electronics Engineers |
Pages | 621-4 |
Number of pages | 4 |
ISBN (Electronic) | 978-1-5386-4707-3 |
ISBN (Print) | 978-1-5386-4708-0 |
DOIs | |
Publication status | Published - 28 Oct 2018 |
Event | IEEE Sensors 2018 - Pullman New Delhi Aerocity, New Delhi, India Duration: 28 Oct 2018 → 31 Oct 2018 http://ieee-sensors2018.org |
Publication series
Name | IEEE Sensors |
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Publisher | IEEE |
ISSN (Print) | 1930-0395 |
ISSN (Electronic) | 2168-9229 |
Conference
Conference | IEEE Sensors 2018 |
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Country/Territory | India |
City | New Delhi |
Period | 28/10/18 → 31/10/18 |
Internet address |
Keywords / Materials (for Non-textual outputs)
- image sensors
- Acceleration
- electron sources
- Photonics
- Detectors
- Silicon
- radiation effects