Accurate and Precise Determination of Mechanical Properties of Silicon Nitride Beam Nanoelectromechanical Devices

Hakseong Kim, Dong Hoon Shin, Kirstie Mcallister, Miri Seo, Sangik Lee, Il-suk Kang, Bae Ho Park, Eleanor E. B. Campbell, Sang Wook Lee

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Engineering & Materials Science

Chemical Compounds