Accurate and Precise Determination of Mechanical Properties of Silicon Nitride Beam Nanoelectromechanical Devices

Hakseong Kim, Dong Hoon Shin, Kirstie Mcallister, Miri Seo, Sangik Lee, Il-suk Kang, Bae Ho Park, Eleanor E. B. Campbell, Sang Wook Lee

Research output: Contribution to journalArticlepeer-review

Search results