An Experimental Technique to Obtain the Specific Contact Resistance of Multi-layer Interconnections

H. B. Harrison, G. K. Reeves, A. J. Walton

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Original languageUndefined/Unknown
Title of host publicationMat. Res. Soc. Proc. Boston
Pages5
Number of pages1
Publication statusPublished - 1985

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