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Anodic Ta2O5 for CMOS compatible low voltage electrowetting-on-dielectric device fabrication
Y. Li, W. Parkes, Leslie Haworth, A. A. Stokes, K. R. Muir, Peng Li, A. J. Collin, N. G. Hutcheon, R. Henderson, B. Rae, Anthony Walton
Research output: Contribution to journal › Article › peer-review