Application of Optical, X-ray and E-beam Lithography Options to 0.18 Micron Silicon FET Technology

C. M. Reeves, I. C. E. Turcu, J. T. M. Stevenson, A. M. Gundlach, P. Prewett, C. Wilkinson, A. J. Walton

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Original languageUndefined/Unknown
Title of host publicationProceedings ESSDERC 94
Pages4
Number of pages1
Publication statusPublished - 1994

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