Argon cluster impacts on layered silicon, silica, and graphite surfaces

J. Samela, K. Nordlund, J. Keinonen, V. N. Popok, Eleanor E.B. Campbell

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Seven structures of covalently bonded materials are used as targets of 6 keV Ar-12 cluster bombardment in classical molecular dynamics simulations. Energy deposition, cratering and Ar ranges are compared and remarkable differences are found between the structures. In particular, bombardment of a thin 2 nm silica layer on top of the Si(111) surface is shown to behave quite differently from bombardment of pure Si.

Original languageEnglish
Pages (from-to)181-184
Number of pages4
JournalEuropean physical journal d
Issue number1-3
Publication statusPublished - Jul 2007


  • Cluster impact
  • SI
  • MD simulations

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