Argon plasma etching of gallium nitride: spectroscopic surprises

S. A. Brown, R. J. Reeves, B. Rong, Rebecca Cheung, M. Seyboth, C. Kirchner, M. Kamp

Research output: Contribution to journalArticlepeer-review

Original languageUndefined/Unknown
Pages (from-to)263-269
Number of pages7
JournalNanotechnology
Volume11
Publication statusPublished - 2000

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