Argon plasma etching of gallium nitride: spectroscopic surprises

S. A. Brown, R. J. Reeves, R. Cheung, C. Kirchner, M. Kamp

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Original language	Undefined/Unknown
Title of host publication	presented in the 8th International symposium, "Nanostructures: Physics and technology"
Publication status	Published - 2000

Cite this

@inproceedings{43631da40f6d47a1b83038cf6f413a59,

title = "Argon plasma etching of gallium nitride: spectroscopic surprises",

author = "Brown, {S. A.} and Reeves, {R. J.} and R. Cheung and C. Kirchner and M. Kamp",

year = "2000",

language = "Undefined/Unknown",

booktitle = "presented in the 8th International symposium, {"}Nanostructures: Physics and technology{"}",

}