| Original language | Undefined/Unknown |
|---|---|
| Pages (from-to) | 263-269 |
| Number of pages | 7 |
| Journal | Nanotechnology |
| Volume | 11 |
| Publication status | Published - 2000 |
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Argon plasma etching of gallium nitride: spectroscopic surprises
- S. A. Brown
- , R. J. Reeves
- , B. Rong
- , Rebecca Cheung
- , M. Seyboth
- , C. Kirchner
- , M. Kamp
Research output: Contribution to journal › Article › peer-review