Array of high quality surface micromirrors by chemical mechanical polishing of dielectric and metal

I. Underwood, J. T. M. Stevenson, D. W. Calton, A. M. Gundlach, D. G. Vass

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Original languageUndefined/Unknown
Title of host publicationDigest of the LEOS Summer Topical Meetings - Optical MEMS
Publication statusPublished - 1998

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