Array of high quality surface micromirrors by chemical mechanical polishing of dielectric and metal

I. Underwood, J. T. M. Stevenson, D. W. Calton, A. M. Gundlach, D. G. Vass

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Original language	Undefined/Unknown
Title of host publication	Digest of the LEOS Summer Topical Meetings - Optical MEMS
Publication status	Published - 1998

Cite this

@inproceedings{4ecd7bf700234ea799b3240d2209253d,

title = "Array of high quality surface micromirrors by chemical mechanical polishing of dielectric and metal",

author = "I. Underwood and Stevenson, {J. T. M.} and Calton, {D. W.} and Gundlach, {A. M.} and Vass, {D. G.}",

year = "1998",

language = "Undefined/Unknown",

booktitle = "Digest of the LEOS Summer Topical Meetings - Optical MEMS",

}