Array of high quality surface micromirrors by chemical mechanical polishing of dielectric and metal

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Original language	Undefined/Unknown
Title of host publication	Digest of the LEOS Summer Topical Meetings - Optical MEMS
Publication status	Published - 1998

Cite this

@inproceedings{4ecd7bf700234ea799b3240d2209253d,

title = "Array of high quality surface micromirrors by chemical mechanical polishing of dielectric and metal",

author = "I. Underwood and Stevenson, \{J. T. M.\} and Calton, \{D. W.\} and Gundlach, \{A. M.\} and Vass, \{D. G.\}",

year = "1998",

language = "Undefined/Unknown",

booktitle = "Digest of the LEOS Summer Topical Meetings - Optical MEMS",

}