@inproceedings{3d9cf979ecac4e1a8e7e66266ad66857,
title = "Batch encapsulation technique for CMOS based chemical sensors",
abstract = "This paper presents a batch encapsulation technique for CMOS based chemical sensors. SU-8 photoresist is employed as the encapsulant while the sensing membrane of the sensor is directly exposed to the solution. This approach is based on standard photolithographic techniques and thus can be used for processing multiple dies containing chemical sensors in a single step.",
keywords = "Chemical sensor, CMOS, Encapsulation, ISFET, SU-8 photoresist",
author = "T. Prodromakis and P. Georgiou and Constandinou, {T. G.} and K. Michelakis and C. Toumazou",
year = "2009",
month = feb,
day = "20",
doi = "10.1109/BIOCAS.2008.4696939",
language = "English",
isbn = "9781424428793",
series = "2008 IEEE-BIOCAS Biomedical Circuits and Systems Conference, BIOCAS 2008",
pages = "321--324",
booktitle = "2008 IEEE-BIOCAS Biomedical Circuits and Systems Conference, BIOCAS 2008",
note = "2008 IEEE-BIOCAS Biomedical Circuits and Systems Conference, BIOCAS 2008 ; Conference date: 20-11-2008 Through 22-11-2008",
}