The fabrication of carbon nanotube (CNT) based nano electromechanical (NEM) switches and their electro-mechanical properties are discussed. Two different types of nano electromechanical switches, a cantilever type and a doubly-clamped type, will be introduced. The proposal of three terminal structures for the CNT-based NEM switch could lead to improvements in the stability of the switching performance. Both dc electro-mechanical properties and high-frequency measurements are used to study the switching performance. A comparison of the switching performances of both types of nano electromechanical switches is discussed at the end of the paper.
- Carbon nanotube
- Nano electromechanical system
- Nano electromechanical switch
- Doubly clamped suspended system
- Electron beam lithography