Carbon-nanotube-based Nano Electromechanical Switches

SangWook Lee, Anders Eriksson, Abdelrahim A. Sourab, Eleanor E. B. Campbell

Research output: Contribution to journalArticlepeer-review

Abstract

The fabrication of carbon nanotube (CNT) based nano electromechanical (NEM) switches and their electro-mechanical properties are discussed. Two different types of nano electromechanical switches, a cantilever type and a doubly-clamped type, will be introduced. The proposal of three terminal structures for the CNT-based NEM switch could lead to improvements in the stability of the switching performance. Both dc electro-mechanical properties and high-frequency measurements are used to study the switching performance. A comparison of the switching performances of both types of nano electromechanical switches is discussed at the end of the paper.

Original languageEnglish
Pages (from-to)957-961
Number of pages5
JournalJournal of the korean physical society
Volume55
Issue number3
DOIs
Publication statusPublished - Sep 2009

Keywords

  • Carbon nanotube
  • Nano electromechanical system
  • Nano electromechanical switch
  • Cantilever
  • Doubly clamped suspended system
  • Electron beam lithography
  • NANORELAY
  • RESONATOR
  • MEMORY

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