CD reference materials fabricated on monolithic 200 mm wafers for automated metrology tool applications

Richard A. Allen, Ronald G. Dixson, Michael W. Cresswell, William F. Guthrie, Byron J. R. Shulver, A. S. Bunting, Tom Stevenson, Anthony J. Walton

Research output: Chapter in Book/Report/Conference proceedingConference contribution

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Physics & Astronomy