Abstract
This paper characterises a novel Chemical Mechanical Polishing (CMP) based process for the fabrication of nanometer wide transducer gaps for RF MEMS resonators. The process requires one photolithographic step less than previously reported fabrication methods and does not suffer from transducer gap widening, which otherwise strongly affects the impedance of manufactured resonators. CMP test masks were used to evaluate the ability to produce nanometer wide planarised capacitive transducer gaps and to determine the planarity of CMP based processing. As a result of this work, pattern dependent removal rates for polysilicon have been determined and design guidelines defined to optimise the yield of CMP fabricated resonators.
Original language | English |
---|---|
Title of host publication | Micro- and Nanotechnology: Materials, Processes, Packaging, and Systems III |
Editors | JC Chiao, AS Dzurak, C Jagadish, DV Thiel |
Place of Publication | BELLINGHAM |
Publisher | SPIE |
Pages | G4150-G4150 |
Number of pages | 8 |
ISBN (Print) | 978-0-8194-6523-8 |
DOIs | |
Publication status | Published - 2007 |
Event | Conference on Micro- and Nanotechnology - Materials, Processes, Packaging, and System III - Adelaide Duration: 11 Dec 2006 → 13 Dec 2006 |
Conference
Conference | Conference on Micro- and Nanotechnology - Materials, Processes, Packaging, and System III |
---|---|
City | Adelaide |
Period | 11/12/06 → 13/12/06 |
Keywords / Materials (for Non-textual outputs)
- chemical mechanical polishing (CMP)
- radio frequency (RF)
- micro-electro-mechanical systems (MEMS)
- resonators
- fabrication
- nanoscale
- transducer gaps