Characterisation of residual stress in dielectric films studied by automated wafer mapping

Ross Walker, E Sirotkin, G Schiavone, J.G. Terry, S Smith, A.R. Mount, M.P.Y Desmulliez, A J Walton

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Original languageEnglish
Title of host publicationMicroelectronic Test Structures (ICMTS), 2014 International Conference on
PublisherInstitute of Electrical and Electronics Engineers (IEEE)
Pages98-103
Number of pages6
DOIs
Publication statusPublished - Mar 2014

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