Characterization of mask alignment offsets using wire segment holograms and a progressive offset technique

S A AbuGhazaleh, P Christie, S Smith, A M Gundlach, J T M Stevenson, A J Walton

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Original languageEnglish
Title of host publicationMicroelectronic Test Structures, 2000. ICMTS 2000. Proceedings of the 2000 International Conference on
Pages15-20
Number of pages6
Publication statusPublished - 2000

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