Characterization of Sub-micron MOS Transistors modified using a focused Ion Beam System

D. W. Travis, C. M. Reeves, A. M. Gundlach, J. T. M. Stevenson, A. J. Walton

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Original languageUndefined/Unknown
Title of host publicationIEEE International Conference on Microelectronic Test Structures
Pages5
Number of pages1
Publication statusPublished - 2000

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