CMOS Compatible Micro and Nano Electrodes for Electrochemical Sensing: Plenary Session

Research output: Contribution to conferenceOtherpeer-review

Abstract / Description of output

Microscale electrodes have been widely researched over the last thirty or so years with much interest centered on electrochemical sensing applications. We developed a microscale electrode capability that can be fabricated by post-processing foundry CMOS wafers. This approach offers a typical range of “More-Than-Moore” advantages including the integration of active electronics; scaling from individual – or a small number of – electrodes to high numbers of electrodes in one– and two–dimensional arrays; and the potential for reproducible and economical manufacture at scale. The use of such microelectrodes and arrays of microelectrodes continues to be reported for electrochemical sensing in a range of applications including biosensing and sensing in harsh environments.

Compared to their microscale equivalents, electrodes with nanoscale dimensions have been shown – both in simulation and experimentally – to exhibit enhanced characteristics and performance. We have developed a nanoscale electrode system, Microsquare Nanoband Edge Electrode (MNEE), that can be produced using standard microscale lithography and microfabrication techniques. MNEEs thus combine the enhanced performance of nanoscale electrode dimensions with the existing advantages of the microscale “More-Than-Moore” approach.
Original languageEnglish
Publication statusPublished - 5 Jul 2023
EventThe 23rd IEEE International Conference on Nanotechnology (IEEE-NANO 2023) - Ramada Plaza by Wyndham, Jeju Ocean Front, 66 Tapdong ro, Jeju, Korea-Republic Of 690 736, Jeju, Korea, Republic of
Duration: 2 Jul 20235 Jul 2023
Conference number: 23rd


ConferenceThe 23rd IEEE International Conference on Nanotechnology (IEEE-NANO 2023)
Abbreviated titleIEEE-NANO 2023
Country/TerritoryKorea, Republic of
Internet address


Dive into the research topics of 'CMOS Compatible Micro and Nano Electrodes for Electrochemical Sensing: Plenary Session'. Together they form a unique fingerprint.

Cite this