CMOS Process Uniformity Evaluation Through the Characterisation of Parasitic Transistors

D. Wilson, A. J. Walton, J. M. Robertson, R. J. Holwill

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Original language	Undefined/Unknown
Title of host publication	Proceedings 1989 IEEE International Conference on Microelectronic Test Structures
Pages	6
Number of pages	1
Publication status	Published - 1989

Cite this

@inproceedings{edb4a5ff4d2041e08669ce95bdafa00b,

title = "CMOS Process Uniformity Evaluation Through the Characterisation of Parasitic Transistors",

author = "D. Wilson and Walton, {A. J.} and Robertson, {J. M.} and Holwill, {R. J.}",

year = "1989",

language = "Undefined/Unknown",

pages = "6",

booktitle = "Proceedings 1989 IEEE International Conference on Microelectronic Test Structures",

}