Combined transmission line measurement structures to study thin film resistive sensor fabrication

A Tabasnikov, A J Walton, S Smith

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Original languageEnglish
Title of host publication2015 International Conference on Microelectronic Test Structures (ICMTS)
PublisherInstitute of Electrical and Electronics Engineers (IEEE)
Pages175-180
Number of pages6
DOIs
Publication statusPublished - 2015

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