Combined transmission line measurement structures to study thin film resistive sensor fabrication

A Tabasnikov, A J Walton, S Smith

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Original language	English
Title of host publication	2015 International Conference on Microelectronic Test Structures (ICMTS)
Publisher	Institute of Electrical and Electronics Engineers
Pages	175-180
Number of pages	6
DOIs	https://doi.org/10.1109/ICMTS.2015.7106136
Publication status	Published - 2015

Access to Document

SMART microsystems
Walton, A. (Principal Investigator)
EPSRC
1/04/10 → 28/02/15
Project: Research

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Combined transmission line measurement structures to study thin film resistive sensor fabrication. / Tabasnikov, A; Walton, A J; Smith, S.
2015 International Conference on Microelectronic Test Structures (ICMTS). Institute of Electrical and Electronics Engineers, 2015. p. 175-180.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

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