Combined transmission line measurement structures to study thin film resistive sensor fabrication

A Tabasnikov, A J Walton, S Smith

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Original language	English
Title of host publication	2015 International Conference on Microelectronic Test Structures (ICMTS)
Publisher	Institute of Electrical and Electronics Engineers (IEEE)
Pages	175-180
Number of pages	6
DOIs	https://doi.org/10.1109/ICMTS.2015.7106136
Publication status	Published - 2015

Access to Document

@inproceedings{be63eeb11c754add9d45fa20bb1a46ca,

title = "Combined transmission line measurement structures to study thin film resistive sensor fabrication",

author = "A Tabasnikov and Walton, {A J} and S Smith",

year = "2015",

doi = "10.1109/ICMTS.2015.7106136",

language = "English",

pages = "175--180",

booktitle = "2015 International Conference on Microelectronic Test Structures (ICMTS)",

publisher = "Institute of Electrical and Electronics Engineers (IEEE)",

address = "United States",

}

2015 International Conference on Microelectronic Test Structures (ICMTS). Institute of Electrical and Electronics Engineers (IEEE), 2015. p. 175-180.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

TY - GEN

T1 - Combined transmission line measurement structures to study thin film resistive sensor fabrication

AU - Tabasnikov, A

AU - Walton, A J

AU - Smith, S

PY - 2015

Y1 - 2015

U2 - 10.1109/ICMTS.2015.7106136

DO - 10.1109/ICMTS.2015.7106136

M3 - Conference contribution

SP - 175

EP - 180

BT - 2015 International Conference on Microelectronic Test Structures (ICMTS)

PB - Institute of Electrical and Electronics Engineers (IEEE)

ER -