Comparison of Measurement Techniques for Linewidth Metrology on Advanced Photomasks

Stewart Smith; Andreas Tsiamis; M. McCallum; A. C. Hourd; Tom Stevenson; Anthony Walton; R. G. Dixson; Richard A. Allen; J. E. Potzick; M. W. Cresswell; N. G. Orji

doi:10.1109/TSM.2008.2010733

Comparison of Measurement Techniques for Linewidth Metrology on Advanced Photomasks

Stewart Smith, Andreas Tsiamis, M. McCallum, A. C. Hourd, Tom Stevenson, Anthony Walton, R. G. Dixson, Richard A. Allen, J. E. Potzick, M. W. Cresswell, N. G. Orji

School of Engineering

Research output: Contribution to journal › Article › peer-review

Abstract

This paper compares electrical, optical, and atomic force microscope (AFM) measurements of critical dimension (CD) made on a chrome on quartz photomask. Test structures suitable for direct, on-mask electrical probing have been measured using the above three techniques. These include cross-bridge linewidth structures and pairs of Kelvin bridge resistors designed to investigate dimensional mismatch. Overall, the results show very good agreement between the electrical measurements and those made with a calibrated CD-AFM system, while the optical metrology system overestimates the measured width. The uncertainty in each of the measurements has been considered, and for the first time an attempt has been made to describe the levels and sources of uncertainty in the electrical measurement of CD on advanced binary photomasks.

Original language	English
Pages (from-to)	72-79
Number of pages	8
Journal	IEEE Transactions on Semiconductor Manufacturing
Volume	22
Issue number	1
DOIs	https://doi.org/10.1109/TSM.2008.2010733
Publication status	Published - Feb 2009

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10.1109/TSM.2008.2010733

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Cite this

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title = "Comparison of Measurement Techniques for Linewidth Metrology on Advanced Photomasks",

abstract = "This paper compares electrical, optical, and atomic force microscope (AFM) measurements of critical dimension (CD) made on a chrome on quartz photomask. Test structures suitable for direct, on-mask electrical probing have been measured using the above three techniques. These include cross-bridge linewidth structures and pairs of Kelvin bridge resistors designed to investigate dimensional mismatch. Overall, the results show very good agreement between the electrical measurements and those made with a calibrated CD-AFM system, while the optical metrology system overestimates the measured width. The uncertainty in each of the measurements has been considered, and for the first time an attempt has been made to describe the levels and sources of uncertainty in the electrical measurement of CD on advanced binary photomasks.",

author = "Stewart Smith and Andreas Tsiamis and M. McCallum and Hourd, {A. C.} and Tom Stevenson and Anthony Walton and Dixson, {R. G.} and Allen, {Richard A.} and Potzick, {J. E.} and Cresswell, {M. W.} and Orji, {N. G.}",

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AU - Tsiamis, Andreas

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AU - Stevenson, Tom

AU - Walton, Anthony

AU - Dixson, R. G.

AU - Allen, Richard A.

AU - Potzick, J. E.

AU - Cresswell, M. W.

AU - Orji, N. G.

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AB - This paper compares electrical, optical, and atomic force microscope (AFM) measurements of critical dimension (CD) made on a chrome on quartz photomask. Test structures suitable for direct, on-mask electrical probing have been measured using the above three techniques. These include cross-bridge linewidth structures and pairs of Kelvin bridge resistors designed to investigate dimensional mismatch. Overall, the results show very good agreement between the electrical measurements and those made with a calibrated CD-AFM system, while the optical metrology system overestimates the measured width. The uncertainty in each of the measurements has been considered, and for the first time an attempt has been made to describe the levels and sources of uncertainty in the electrical measurement of CD on advanced binary photomasks.

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Comparison of Measurement Techniques for Linewidth Metrology on Advanced Photomasks

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