Comparison of Measurement Techniques for Linewidth Metrology on Advanced Photomasks

Stewart Smith, Andreas Tsiamis, M. McCallum, A. C. Hourd, Tom Stevenson, Anthony Walton, R. G. Dixson, Richard A. Allen, J. E. Potzick, M. W. Cresswell, N. G. Orji

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Physics & Astronomy

Chemical Compounds

Engineering & Materials Science