Dependence of process parameters on stress generation in aluminium thin films

A. B. Horsfall; K. Wang; J. M. M. dos Santos; S. M. Soare; S. J. Bull; N. G. Wright; A. G. ONeill; Jonathan Terry; Anthony Walton; A. M. Gundlach; Tom Stevenson

Dependence of process parameters on stress generation in aluminium thin films

A. B. Horsfall, K. Wang, J. M. M. dos Santos, S. M. Soare, S. J. Bull, N. G. Wright, A. G. ONeill, Jonathan Terry, Anthony Walton, A. M. Gundlach, Tom Stevenson

School of Engineering

Research output: Contribution to journal › Article › peer-review

Original language	Undefined/Unknown
Pages (from-to)	482-487
Number of pages	6
Journal	IEEE Transactions on Device and Materials Reliability
Volume	4
Issue number	3
Publication status	Published - 2004

Cite this

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title = "Dependence of process parameters on stress generation in aluminium thin films",

author = "Horsfall, {A. B.} and K. Wang and Santos, {J. M. M. dos} and Soare, {S. M.} and Bull, {S. J.} and Wright, {N. G.} and ONeill, {A. G.} and Jonathan Terry and Anthony Walton and Gundlach, {A. M.} and Tom Stevenson",

year = "2004",

language = "Undefined/Unknown",

volume = "4",

pages = "482--487",

journal = "IEEE Transactions on Device and Materials Reliability",

publisher = "Institute of Electrical and Electronics Engineers",

number = "3",

}

TY - JOUR

T1 - Dependence of process parameters on stress generation in aluminium thin films

AU - Horsfall, A. B.

AU - Wang, K.

AU - Santos, J. M. M. dos

AU - Soare, S. M.

AU - Bull, S. J.

AU - Wright, N. G.

AU - ONeill, A. G.

AU - Terry, Jonathan

AU - Walton, Anthony

AU - Gundlach, A. M.

AU - Stevenson, Tom

PY - 2004

Y1 - 2004

M3 - Article

VL - 4

SP - 482

EP - 487

JO - IEEE Transactions on Device and Materials Reliability

JF - IEEE Transactions on Device and Materials Reliability

IS - 3

ER -